Laser writer

  • Minimum feature size of 1 ┬Ám 
  • Alignment accuracy of 500 nm
  • 375 nm laser diode
  • 50-level greyscale exposure
  • Patterns up to 30 x 30 mm2

 

Tool Specs

Tool Status Up
Manufacturer Heidelberg
Model uPG 101
Typical Application Direct laser lithography
Location 6060.9
Related Documents

Standard Operating Procedure

Training Contact Mohamad Rezaei
rezaei@4dlabs.ca