Mask aligner 2

  • processing for small pieces, 50, 100, and 150 mm wafers
  • near UV (365 nm) LED light source and optics
  • automatic alignment capabilities with front and back-side alignment
  • sub-micron features with vacuum contact
  • configured for 125 and 175 mm masks

Tool Specs

Manufacturer OAI
Model MBA 800
Typical Application Optical lithography
Location 6060.11
Related Documents

Standard Operating Procedure

Training Contact Grace Li - li@4dlabs.ca