Mask writer
Photomasks can be fabricated with this tool. A variety of write lenses can be utilized to write various feature sizes at an efficient rate. The minimum resolution of the tool ~600 nm. This tool is operated by staff only. Instructions for ordering masks are found in the SOP section below.
Tool Specs
| Manufacturer | Heidelberg |
|---|---|
| Model | DWL 66FS |
| Typical Application | Photomask fabrication |
| Location | 6060.9 |
| Related Documents | Standard Operating Procedure Mask Writing Services Mask Order Form |
| Training Contact | info@4dlabs.ca |