PVD 8

  • Sputter: Ni
  • Sources: 3 sputter RF
  • 5E-7 Torr base pressure
  • processing for small pieces, 50 mm, 100 mm, and 150 mm wafers

Tool Specs

Tool Status Up
Manufacturer Kurt J. Lesker
Model PVD75
Typical Application Ni sputter
Location 6060.10
Training Contact Chris Balicki - balicki@4dlabs.ca