PVD 9

  • Sputter: Ag
  • Sources: 2 thermal and 1 sputter
  • 5E-7 Torr base pressure
  • processing for small pieces, 50 mm, 100 mm, and 150 mm wafers

Tool Specs

Tool Status Up
Manufacturer Kurt J. Lesker
Model PVD75
Typical Application Silver deposition
Related Documents Standard Operating Procedure
Location 6060.10
Training Contact Chris Balicki - balicki@4dlabs.ca