Reflectometer

  • Measurement of thickness and refractive index of a wide range of film thicknesses (3 nm < t < 250 μm) 
  • Acquisition of K (extension coefficient) and N (reflectivity index) for dielectric materials

Tool Specs

Tool Status Up
Manufacturer Filmetrics
Model F-20 UVX
Typical Application Film thickness analysis
Location 6060.2
Related Documents

Standard Operating Procedure

Training Contact Grace Li - li@4dlabs.ca