SEM 3 - Explorer
The Explorer is a scanning electron microscope that is designed for the imaging and elemental analysis of a wide spectrum of surfaces and particulates. This system is equipped with:
- Imaging resolution of ~20 nm
- Secondary-electron detector
- Backscattered electron detector
- Variable Pressure of 0.01-1.0 Torr
- Acceleration Voltage of 0.2-25 kV
- OmegaMax EDS Detector with a resolution of 133 eV
- Stage motion up to 75 x 95 mm
- Chamber size of 170 x 220 x 50 mm (x, y, z)Tool Specs
| Manufacturer | FEI/Aspex |
|---|---|
| Model | Explorer |
| Typical Application | Imaging and elemental analysis |
| Location | 7130 |
| Related Documents | Standard Operating Procedure Sample Preparation Guidelines |
| Contact | info@4dlabs.ca |