XPS, AES, ISS, SEM

  • XPS: X-ray Photoelectron Spectroscopy, angle-resolved XPS, ion etching for surface cleaning and depth profiling with XPS
  • XPM: X-ray Photoelectron Microscopy
  • AES: Auger Electron Spectrometry
  • SAM: Scanning Auger Microscopy 
  • SEM: Scanning Electron Microscopy
  • ISS: Ion Scattering Spectroscopy
  • SIMS: Secondary Ion Mass Spectrometry
  • Heating and cooling stage (-160 – 600 °C)

Tool Specs

Tool Status

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Manufacturer Kratos Analytical
Model Axis Ultra DLD
Location 6140
Related Documents Standard Operating Procedure
Training Contact Dennis Hsiao - hsiao@4dlabs.ca