Plasma stripper 1

  • Parallel plate design
  • Resist stripping or ashing with O2 (Ar gas also available
  • 450 W reactor
  • Processing for small pieces, 50 and 100 mm wafers

 

Tool Specs

Tool Status Up
Manufacturer Technics
Model PEII-A
Typical Application Photoresist ashing
Location 6060.5
Related Documents

Standard Operating Procedure

Training Contact
Grace Li
li@4dlabs.ca