Full equipment list

Fabrication and prototyping tools

The Fabrication and Prototyping Facility has many tools for development of micro- and nanostructured materials and novel device designs. Many of these tools are located in our Class 100 Clean Room.

Materials and device characterization tools

The Materials and Device Characterization Facility has many tools to provide detailed structural, compositional and performance characteristics of various materials and devices.

X-Ray crystal structure and surface composition analysis

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