PVD 5

  • Thermal: Cr, Au, Al, Cu, Ag, Ni, In, Au:Ge
  • Sources: 2 thermal
  • Co-deposition capability
  • Processing for small pieces, 50 mm, and 100 mm wafers

Tool Specs

Tool Status Up
Manufacturer Custom build
Typical Application Thermal deposition
Location 6140
Related Documents

Standard Operating Procedure

Training Contact Chris Balicki - balicki@4dlabs.ca